E19100 - SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting StdPbc-0323 This Guide covers angle resolved

This Guide covers angle resolved light scatter (ARLS) measurements performed on monocrystalline (also known as single crystal) and multicrystalline (also known in some regions as polycrystalline) semiconductor wafer surfaces

This is reported by two experiments

Recognize the steps required to establish electrically safe work conditions

The test method is based on recording and evaluating images of the wafer surface obtained by a digital camera under directional transmitted or reflected light illumination

This Guide can be applied to inline equipment as well as batch equipment

E19100 - SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting StdPbc-0323 This Guide covers angle resolved* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1