Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement Ingestion-build-276583 This document specifies the principles

This document specifies the principles

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Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement Ingestion-build-276583 This document specifies the principles1 Scope This International Standard specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar