In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD Battery Electrode Fabrication

In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD Battery Electrode FabricationEQ TM106 LD is a high precision thickness sensor monitor for the thin film deposition process. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystals oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub Angstrom (0. 037 for this equipment). SPECIFICATIONS: Power 5 VDC, 400 mA Frequency Range 6. 0

0) is included to set various working modes for measuring capacity and lifecycle for all types of rechargeable batteries

(+/- 10%) with roughness: ~10 nm RMS as measured by the Wyko (white light interferometer) for 50 umx50 um area

L=L1+L2:=200+130=330mm

Material:                                   Natural ABS With ESD Coating

01Ohms/cm (If you would like to measure the resistivity accurately

or  heating plate into the chamber

Resistivity:                       >50  Ohm

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Vacuum gauge and valves Two vacuum flanges are included for the glove box to achieve vacuum to remove moisture and oxygen without expensive inert gas purging

All pressing dies are made by high-stretched carbon steel to achieve high hardness to meet the essential requirements of making ceramic or metal samples

This allows downloading data for further analysis

Max heating or cooling rate < 5oC/ minute